Showing posts with label semiconductor. Show all posts
Showing posts with label semiconductor. Show all posts

Electronic Pressure Measurement: AMETEK USG Model 1536 Stainless Steel Semiconductor Pressure Gauges

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DESCRIPTION
Model 1536 Stainless Steel Semiconductor Pressure Gauge
AMETEK USG Model 1536
Stainless Steel Pressure Gauge for
Semiconductor Industry


AMETEK U.S. Gauge Model 1536 pressure gauges are designed and manufactured for gas distribution equipment used in semiconductor manufacturing. These 2 inch, all stain- less steel gauges are clean room produced, nitrogen purged, and double bagged.

These instruments are compatible with many toxic and corrosive gases. Welded face seal connections provide a threadless pressure seal and virtually eliminate a major source of contamination. Also available in NPT connections.

The Model 1536 is available in pressure ranges from 0 to 30 inches Hg VAC, to 0 to 4000 psi. This precision gauge incorporates rugged case construction with pressure relief.

FEATURES
  • Cleaning for UHP gas applications exceeding ANSI B40.100 specifications 
  • Ra: 10 μinch (0.25 μm) finish on face seal connections 
  • Helium leak tested to con rm leakage rates of less than 10-9 scc/sec. 
  • All stainless steel (Type 316L) internal surfaces for corrosion resistance 
  • Large, easy-to-read dial graduations 
  • Handles wide variety of exotic gases 
  • Available with welded face seal fittings, or NPT connection 
  • Assembled and packaged in Class 10 clean room 
  • Low mount or center back connections
SPECIFICATIONS
Close-up of VCR connection
Close-up of
VCR connection
  • Size: 2 inch diameter
  • Case: Drawn stainless steel polished with pressure relief Ring and Window: One piece, threaded polycarbonate Pointer: Aluminum, black finish.
  • Dial: Aluminum, white background with black markings Bourdon Tube: Type 316L stainless steel.
  • Connection: Type 316L stainless steel, low mount or center back mount, male or female face seal  fitting, or 1/4 inch male NPT – connectors are shipped with protective plastic caps.
  • Surface Finish:
    • Face seal connections: Ra: 10 μinch (0.25 μm) 1/4 inch NPT connections: 32 Ra.
  • Ranges: 30 inches Hg vacuum to 4000 psi, single or dual scale, see ordering information.
  • Overpressure: 130% of span maximum Working Temperature:
  • Ambient: -40°F (-40°C) to 149°F (65°C) Fluid: Maximum 212°F (100°C) Accuracy:
  • ±1% of span.
  • Scales: psi, bar, kg/cm2, KPa, MPa (single or dual scale) inches Hg (for vacuum range, compound and vacuum gauges only).